JPH0127549B2 - - Google Patents

Info

Publication number
JPH0127549B2
JPH0127549B2 JP58122860A JP12286083A JPH0127549B2 JP H0127549 B2 JPH0127549 B2 JP H0127549B2 JP 58122860 A JP58122860 A JP 58122860A JP 12286083 A JP12286083 A JP 12286083A JP H0127549 B2 JPH0127549 B2 JP H0127549B2
Authority
JP
Japan
Prior art keywords
detector
lens barrel
sample
cover
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58122860A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6014737A (ja
Inventor
Setsuo Norioka
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58122860A priority Critical patent/JPS6014737A/ja
Publication of JPS6014737A publication Critical patent/JPS6014737A/ja
Publication of JPH0127549B2 publication Critical patent/JPH0127549B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP58122860A 1983-07-06 1983-07-06 反射電子検出装置 Granted JPS6014737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58122860A JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58122860A JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Publications (2)

Publication Number Publication Date
JPS6014737A JPS6014737A (ja) 1985-01-25
JPH0127549B2 true JPH0127549B2 (en]) 1989-05-30

Family

ID=14846424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58122860A Granted JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Country Status (1)

Country Link
JP (1) JPS6014737A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5315149B2 (ja) * 2009-07-07 2013-10-16 株式会社アルバック 四重極型質量分析計

Also Published As

Publication number Publication date
JPS6014737A (ja) 1985-01-25

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